Materials science of microelectromechanical systems (MEMS) devices II :  symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / 
editors by Maarten P. de Boer ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  c2000 
 - xiii, 314 p. :  ill. ;  23 cm. 
 - Materials Research Society symposium proceedings ;  v. 605 .
 - Materials Research Society symposium proceedings .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>1558995137 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Microelectronics--Materials--Congresses<br/>Microactuators--Materials--Congresses