00933nam a2200217 a 4500001001400000003000700014005001700021008004100038020001500079040000800094245019800102260005700300300003500357490006300392504005000455650004700505650004400552650004200596700002400638830005300662vtls000062012KUKTEM20251117145521.0120615t2000    paua   f b    001 0 eng d  a1558995137  aUMP00aMaterials science of microelectromechanical systems (MEMS) devices II :bsymposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. /ceditors by Maarten P. de Boer ... [et al.]  aWarrendale, PA :bMaterials Research Society,cc2000  axiii, 314 p. :bill. ;c23 cm.1 aMaterials Research Society symposium proceedings ;vv. 605  aIncludes bibliographical references and index 0aMicroelectromechanical systemsvCongresses 0aMicroelectronicsxMaterialsvCongresses 0aMicroactuatorsxMaterialsvCongresses1 aDe Boer, Maarten P. 0aMaterials Research Society symposium proceedings