TY  - BOOK
AU  - De Boer,Maarten P.
TI  - Materials science of microelectromechanical systems (MEMS) devices II: symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 1558995137
PY  - 2000///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Microelectronics
KW  - Materials
KW  - Microactuators
N1  - Includes bibliographical references and index
ER  -