Advanced nanoscale ULSI interconnects :  fundamentals and applications / 
edited by Yosi Shacham-Diamand ... [et al.] 
 - New York :  Springer,  2009 
 - xx, 537 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780387958675 0387958673 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration<br/>Nanoelectromechanical systems