TY  - BOOK
AU  - Shacham-Diamand,Yosi
TI  - Advanced nanoscale ULSI interconnects: fundamentals and applications 
SN  - 9780387958675
PY  - 2009///
CY  - New York
PB  - Springer
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Nanoelectromechanical systems
N1  - Includes bibliographical references and index
ER  -