TY  - BOOK
AU  - Gibson,Ursula Jane
AU  - White,Alice E.
AU  - Pronko,Peter P.
TI  - Materials modification and growth using Ion beams: symposium held April 21-23, 1987, Anaheim, California, U.S.A. 
T2  - Materials Research Society symposia proceedings,
SN  - 9780931837609
PY  - 1987///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductor doping
N1  - "Papers presented at the symposium on Materials Modification and Growth Using Ion Beams held April 21-23, 1987, as part of the MRS meeting in Anaheim, CA"; Includes bibliographical references and indexes
ER  -