01517nam a2200313 a 4500001001400000003000700014005001700021008004100038020001800079020001500097039004600112040000800158090002400166245017800190260005700368300003400425490007300459500015900532504005200691650003300743650003700776700002400813700002000837700002100857830006100878952013500939999002701074999010201101vtls000061974KUKTEM20251117145607.0120615t1987    paua   f      001 0 eng d  a9780931837609  a093183760X 9a201303291644bsainiy201206151028zsafura  aUMP  aTK7871.85 .M38 198700aMaterials modification and growth using Ion beams :bsymposium held April 21-23, 1987, Anaheim, California, U.S.A. /ceditors, Ursula Gibson, Alice E. White, Peter P. Pronko  aPittsburgh, Pa. :bMaterials Research Society,c1987  axix, 415 p. :bill. ;c24 cm.1 aMaterials Research Society symposia proceedings,x0272-9172 ;vv. 93  a"Papers presented at the symposium on Materials Modification and Growth Using Ion Beams held April 21-23, 1987, as part of the MRS meeting in Anaheim, CA"  aIncludes bibliographical references and indexes 0aIon implantationvCongresses 0aSemiconductor dopingvCongresses1 aGibson, Ursula Jane1 aWhite, Alice E.1 aPronko, Peter P. 0aMaterials Research Society symposia proceedings ;vv. 93  00104070a20000b20000d2019-09-04g103.77l0oTK7871.85 .M38 1987p0000071763r2019-09-04 00:00:00t1v103.77w2019-09-04yOPEN  aVIRTUA40c49480d49486  aVTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5000*5040*6500*6501*7000*7001*7002*8300*9992