TY  - BOOK
AU  - Makabe,T.
AU  - Petrović,Z.
TI  - Plasma electronics: applications in microelectronic device fabrication 
T2  - Series in plasma physics
SN  - 9780750309769
PY  - 2006///
CY  - New York
PB  - Taylor & Francis
KW  - Plasma engineering
N1  - Includes bibliographical references and index
ER  -