Dielectric films for advanced microelectronics / 
edited by Mikhail Baklanov, Martin Green, and Karen Maex 
 - Chichester, England ;  Hoboken, NJ :  John Wiley & Sons,  c2007 
 - xxii, 486 p. :  ill. ;  26 cm. 
 - Wiley series in materials for electronic and optoelectronic applications .
 - Wiley series in materials for electronic and optoelectronic applications .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470013601 (hbk.) 0470013605 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric films<br/>Microelectronics--Materials