00997nam a2200253 a 4500001001400000003000700014005001700021008004100038020002500079020002200104040000800126245011100134260006800245300003500313490007700348504005000425650002100475650003200496700002200528700001800550700001600568830007700584856008200661vtls000037792KUKTEM20251117150035.0090615t2007    enka   f b    001 0 eng d  a9780470013601 (hbk.)  a0470013605 (hbk.)  aUMP00aDielectric films for advanced microelectronics /cedited by Mikhail Baklanov, Martin Green, and Karen Maex  aChichester, England ;aHoboken, NJ :bJohn Wiley & Sons,cc2007  axxii, 486 p. :bill. ;c26 cm.1 aWiley series in materials for electronic and optoelectronic applications  aIncludes bibliographical references and index 0aDielectric films 0aMicroelectronicsxMaterials1 aBaklanov, Mikhail1 aGreen, Martin1 aMaex, Karen 0aWiley series in materials for electronic and optoelectronic applications413Table of contents onlyuhttp://www.loc.gov/catdir/toc/ecip071/2006030740.html