TY  - BOOK
AU  - Baklanov,Mikhail
AU  - Green,Martin
AU  - Maex,Karen
TI  - Dielectric films for advanced microelectronics
T2  - Wiley series in materials for electronic and optoelectronic applications
SN  - 9780470013601 (hbk.)
PY  - 2007///
CY  - Chichester, England, Hoboken, NJ
PB  - John Wiley & Sons
KW  - Dielectric films
KW  - Microelectronics
KW  - Materials
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip071/2006030740.html
ER  -