00884nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245011200120260011100232300003400343490006500377504004000442650005500482650004400537700002000581830006500601vtls000034475KUKTEM20251117150037.0090212t2008    enka   f b    000 0 eng d  a9781860948626  a1860948626  aUMP00aAdvances in multiphysics simulation and experimental testing of MEMS /ceditors Attilio Frangi ... [et al.]  aLondon :bImperial College Press ;aHackensack, N.J. :bDistributed by World Scientific Publishing,cc2008  axii, 489 p. :bill. ;c24 cm.1 aComputational and experimental methods in structures ;vv. 2  aIncludes bibliographical references 0aMicroelectromechanical systemsxSimulation methods 0aMicroelectromechanical systemsxTesting1 aFrangi, Attilio 0aComputational and experimental methods in structures ;vv. 2