TY - BOOK AU - Frangi,Attilio TI - Advances in multiphysics simulation and experimental testing of MEMS T2 - Computational and experimental methods in structures SN - 9781860948626 PY - 2008/// CY - London, Hackensack, N.J. PB - Imperial College Press, Distributed by World Scientific Publishing KW - Microelectromechanical systems KW - Simulation methods KW - Testing N1 - Includes bibliographical references ER -