Chemical perspectives of microelectronic materials III :  symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / 
editors, C.R. Abernathy ... [et al.] 
 - Pittsburgh, Pa. :  Materials Research Society,  c1993 
 - xv, 727 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 282 .
 - Materials Research Society symposia proceedings ;  v. 282 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558991774 1558991778 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Congresses<br/>Semiconductors--Congresses<br/>Surface chemistry--Congresses