00925nam a2200229 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245017700120260005800297300003300355490006300388504005200451650004400503650003100547650003400578700002100612830006200633vtls000060547KUKTEM20251117150103.0120529t1993    paua   f b    101 0 eng d  a9781558991774  a1558991778  aUMP00aChemical perspectives of microelectronic materials III :bsymposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. /ceditors, C.R. Abernathy ... [et al.]  aPittsburgh, Pa. :bMaterials Research Society,cc1993  axv, 727 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 282  aIncludes bibliographical references and indexes 0aMicroelectronicsxMaterialsvCongresses 0aSemiconductorsvCongresses 0aSurface chemistryvCongresses1 aAbernathy, C. R. 0aMaterials Research Society symposia proceedings ;vv. 282