01159nam a2200277 a 4500 vtls000060547 KUKTEM 20251117150103.0 120529t1993 paua f b 101 0 eng d 9781558991774 1558991778 201212111151 fauzi 201205291230 safura UMP TK7874 .C44 1993 Chemical perspectives of microelectronic materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. / editors, C.R. Abernathy ... [et al.] Pittsburgh, Pa. : Materials Research Society, c1993 xv, 727 p. : ill. ; 24 cm. Materials Research Society symposium proceedings ; v. 282 Includes bibliographical references and indexes Microelectronics Materials Congresses Semiconductors Congresses Surface chemistry Congresses Abernathy, C. R. Materials Research Society symposia proceedings ; v. 282 0 0 0 0 20000 20000 2019-09-04 107.07 0 TK7874 .C44 1993 0000068312 2019-09-04 00:00:00 1 107.07 2019-09-04 OPEN VIRTUA40 51127 51133 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4900*5040*6500*6501*6502*7000*8300*9992