TY  - BOOK
AU  - Abernathy,C.R.
TI  - Chemical perspectives of microelectronic materials III: symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558991774
PY  - 1993///
CY  - Pittsburgh, Pa.
PB  - Materials Research Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
KW  - Semiconductors
KW  - Surface chemistry
N1  - Includes bibliographical references and indexes
ER  -