TY  - BOOK
AU  - Freund,L.B.
AU  - Suresh,S.
TI  - Thin film materials: stress, defect formation, and surface evolution 
SN  - 9780521529778
PY  - 2009///
CY  - Cambridge, [England], New York
PB  - Cambridge University Press
KW  - Thin films
N1  - Includes bibliographical references (p. 713-737) and indexes
UR  - http://www.loc.gov/catdir/enhancements/fy1001/2009289764-t.html
ER  -