Nanofabrication :  fundamentals and applications / 
edited by Ampere A. Tseng 
 - New Jersey :  World Scientific ,  2008 
 - viii, 574 p. :  ill. (some col.) ;  26 cm. 
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9789812700766 9812700765 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructured materials<br/>Nanostructures<br/>Scanning probe microscopy<br/>Lithography, Electron beam