TY  - BOOK
AU  - Tseng,Ampere A.
TI  - Nanofabrication: fundamentals and applications 
SN  - 9789812700766
PY  - 2008///
CY  - New Jersey
PB  - World Scientific
KW  - Nanostructured materials
KW  - Nanostructures
KW  - Scanning probe microscopy
KW  - Lithography, Electron beam
N1  - Includes bibliographical references and index
ER  -