TY - BOOK AU - Kang,Shinill TI - Micro/nano replication: processes and applications SN - 9780470392133 PY - 2011/// CY - Hoboken, N.J. PB - Wiley KW - Nanotechnology KW - Manufacturing processes KW - Technological innovations KW - Research, Industrial N1 - Includes bibliographical references and index ER -