TY  - BOOK
AU  - Edelstein,Daniel C.
TI  - Advanced interconnects and contacts: symposium held April 5-7, 1999, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558994713
PY  - 1999///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Junctions
KW  - Congresses
KW  - Silicides
KW  - Semiconductor-metal boundaries
KW  - Metallic films
N1  - Includes bibliographical references and indexes
ER  -