Digital holography for MEMS and microsystem metrology / 
edited by Anand Asundi 
 - Chichester, West Sussex, UK :  Wiley,  2011 
 - xxii, 205 p. :  ill. ;  25 cm. 
 - Wiley microsystem and nanotechnology series .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470978696 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Measurement<br/>Microelectronics--Measurement<br/>Holographic testing<br/>Image processing--Digital techniques