TY  - BOOK
AU  - Asundi,Anand
TI  - Digital holography for MEMS and microsystem metrology
T2  - Wiley microsystem and nanotechnology series
SN  - 9780470978696
PY  - 2011///
CY  - Chichester, West Sussex, UK
PB  - Wiley
KW  - Microelectromechanical systems
KW  - Measurement
KW  - Microelectronics
KW  - Holographic testing
KW  - Image processing
KW  - Digital techniques
N1  - Includes bibliographical references and index
ER  -