@book{53639,
	author = {Advanced Metallization Conference and Edelstein, Dan and University of California, Berkeley.},
	title = {Advanced Metallization Conference 2000 (AMC 2000) :},
	publisher = {Materials Research Society,},
	year = {c2000},
	series = {Materials Research Society conference proceedings,},
	address = {Warrendale, Pa. :}
}