01545nam a2200301 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111003800120245039100158246001300549260005800562300003300620490006600653504005000719650005600769650007800825650009200903650002700995650003101022650002801053700001901081710007701100830006601177vtls000059985KUKTEM20251117150215.0120522t2000    paua   f b    101 0 eng d  a9781558995741  a1558995749  aUMP2 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2000 (AMC 2000) :bproceedings of the conference held October 2-5, 2000, in San Diego, California, U.S.A., and October 19-20, 2000, University of Tokyo, Tokyo, Japan. This Conference is sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. /ceditors, Dan Edelstein ... [et al]30aAMC 2000  aWarrendale, Pa. :bMaterials Research Society,cc2000  axx, 706 p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings,x1048-0854  aIncludes bibliographical references and index 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aEdelstein, Dan2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings,x1048-0854