<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Advanced Metallization Conference 2000 (AMC 2000)</title>
    <subTitle>proceedings of the conference held October 2-5, 2000, in San Diego, California, U.S.A., and October 19-20, 2000, University of Tokyo, Tokyo, Japan. This Conference is sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A</subTitle>
  </titleInfo>
  <titleInfo type="alternative">
    <title>AMC 2000</title>
  </titleInfo>
  <name type="conference">
    <namePart>Advanced Metallization Conference</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <name type="personal">
    <namePart>Edelstein, Dan</namePart>
  </name>
  <name type="corporate">
    <namePart>University of California, Berkeley</namePart>
    <namePart>Continuing Education in Engineering</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <genre authority="marc">conference publication</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">pau</placeTerm>
    </place>
    <place>
      <placeTerm type="text">Warrendale, Pa</placeTerm>
    </place>
    <publisher>Materials Research Society</publisher>
    <dateIssued>c2000</dateIssued>
    <dateIssued encoding="marc">2000</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xx, 706 p. : ill. ; 24 cm.</extent>
  </physicalDescription>
  <targetAudience authority="marctarget">specialized</targetAudience>
  <note type="statement of responsibility">editors, Dan Edelstein ... [et al]</note>
  <note>Includes bibliographical references and index</note>
  <subject authority="lcsh">
    <topic>Semiconductors</topic>
    <topic>Design and construction</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Ultra large scale integration</topic>
    <topic>Materials</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Integrated circuits</topic>
    <topic>Ultra large scale integration</topic>
    <topic>Design and construction</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Thin films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metallic films</topic>
    <topic>Congresses</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Metallizing</topic>
    <topic>Congresses</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Materials Research Society conference proceedings</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">9781558995741</identifier>
  <identifier type="isbn">1558995749</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">UMP</recordContentSource>
    <recordCreationDate encoding="marc">120522</recordCreationDate>
    <recordChangeDate encoding="iso8601">20251117150215.0</recordChangeDate>
    <recordIdentifier source="KUKTEM">vtls000059985</recordIdentifier>
  </recordInfo>
</mods>
