TY  - BOOK
AU  - Edelstein,Dan
ED  - Advanced Metallization Conference
ED  - University of California, Berkeley.
TI  - Advanced Metallization Conference 2000 (AMC 2000): proceedings of the conference held October 2-5, 2000, in San Diego, California, U.S.A., and October 19-20, 2000, University of Tokyo, Tokyo, Japan. This Conference is sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. 
T2  - Materials Research Society conference proceedings,
SN  - 9781558995741
PY  - 2000///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Thin films
KW  - Metallic films
KW  - Metallizing
N1  - Includes bibliographical references and index
ER  -