Micro- and nanosystems--materials and devices :  symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. / 
editors: Cengiz S. Ozkan ... [et al.] 
 - Warrendale, PA :  Materials Research Society,  2005 
 - xv, 525 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  v. 872 .
 - Materials Research Society symposia proceedings ;  v. 872 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558998261 1558998268 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Nanotechnology--Congresses