00870nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245016700120260005600287300003300343490006300376504005200439650004700491650003100538700002100569830006200590vtls000062107KUKTEM20251117150221.0120618t2005    paudao f      001 0 eng d  a9781558998261  a1558998268  aUMP00aMicro- and nanosystems--materials and devices :bsymposium held March 28-April 1, 2005, San Francisco, California, U.S.A. /ceditors: Cengiz S. Ozkan ... [et al.]  aWarrendale, PA :bMaterials Research Society,c2005  axv, 525 p. :bill. ;c24 cm.1 aMaterials Research Society symposium proceedings ;vv. 872  aIncludes bibliographical references and indexes 0aMicroelectromechanical systemsvCongresses 0aNanotechnologyvCongresses1 aOzkan, Cengiz S. 0aMaterials Research Society symposia proceedings ;vv. 872