TY  - BOOK
AU  - Ozkan,Cengiz S.
TI  - Micro- and nanosystems--materials and devices: symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558998261
PY  - 2005///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanotechnology
N1  - Includes bibliographical references and indexes
ER  -