Chemical-mechanical planarization :  symposium held April 22-24, 2003, San Francisco, California, U.S.A. / 
editors: Duane S. Boning ... [et al.]. 
 - Warrendale, PA :  Materials Research Society,  2003 
 - xi, 348 p. :  ill. ;  24 cm. 
 - Materials Research Society symposium proceedings ;  767 .
 - Materials Research Society symposia proceedings ;  v. 767 .
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781558997042 1558997040 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Congresses<br/>Grinding and polishing--Congresses<br/>Metals--Pickling--Congresses<br/>Semiconductors--Surfaces--Congresses<br/>Chemical mechanical planarization--Congresses