TY  - BOOK
AU  - Boning,Duane S.
ED  - Materials Research Society.
TI  - Chemical-mechanical planarization: symposium held April 22-24, 2003, San Francisco, California, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558997042
PY  - 2003///
CY  - Warrendale, PA
PB  - Materials Research Society
KW  - Microelectronics
KW  - Materials
KW  - Congresses
KW  - Grinding and polishing
KW  - Metals
KW  - Pickling
KW  - Semiconductors
KW  - Surfaces
KW  - Chemical mechanical planarization
N1  - Includes bibliographical references and indexes
ER  -