Hata, David M. <br/><br/>
Introduction to vacuum technology / 
David Hata 
 - Upper Saddle River, N.J. :  Pearson Prentice Hall,  c2008 
 - vii, 187 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780130450180 (pbk.) 0130450189 (pbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Vacuum technology