TY  - BOOK
AU  - Hata,David M.
TI  - Introduction to vacuum technology
SN  - 9780130450180 (pbk.)
PY  - 2008///
CY  - Upper Saddle River, N.J.
PB  - Pearson Prentice Hall
KW  - Vacuum technology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip075/2006038591.html
ER  -