Franssila, Sami <br/><br/>
Introduction to microfabrication / 
Sami Franssila 
 - 2nd ed. 
 - Chichester, West Sussex, England ;  Hoboken, NJ :  John Wiley & Sons,  2010 
 - [xv], 518 p. :  ill. ;  25 cm. 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>9780470749838 (cloth) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Electronic apparatus and appliances<br/>Microfabrication