00881nam a2200253 a 4500 vtls000052769 KUKTEM 20251117150403.0 110411t2010 enk f 001 0 eng d 9780470749838 (cloth) 201109291543 fauzi 201107140045 VLOAD 201104111613 safura UMP TK7875 .F73 2010 Franssila, Sami Introduction to microfabrication / Sami Franssila 2nd ed. Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010 [xv], 518 p. : ill. ; 25 cm. Includes index Microelectromechanical systems Electronic apparatus and appliances Microfabrication 0 0 0 0 20000 20000 2019-09-04 234.08 0 TK7875 .F73 2010 0000059549 2019-09-04 00:00:00 1 234.08 2019-09-04 OPEN VIRTUA40 57324 57330 VTLSSORT0080*0200*0400*0900*1000*2450*2500*2600*3000*5000*6500*6501*6502*9991