Principles of microelectromechanical systems / 
 Principles of MEMS 
edited by Ki Bang Lee 
 - Hoboken, N.J. :  Wiley,  2011 
 - xii, 667 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780470466346 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems