TY  - BOOK
AU  - Lee,Ki Bang
TI  - Principles of microelectromechanical systems
SN  - 9780470466346
PY  - 2011///
CY  - Hoboken, N.J.
PB  - Wiley
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -