Feedback control of MEMS to atoms / 
editors by Jason J. Gorman, Benjamin Shapiro 
 - New York :  Springer,  c2012 
 - viii, 384 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781441958310 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Feedback control systems<br/>Microelectromechanical systems<br/>Microelectronics