00643nam a2200205 a 4500001001400000003000700014005001700021008004100038020001800079040000800097245008600105260003300191300003500224504005000259650002900309650003500338650002100373700002100394700002200415vtls000060075KUKTEM20251117150407.0120523t2012    nyua   f b    001 0 eng d  a9781441958310  aUMP00aFeedback control of MEMS to atoms /ceditors by Jason J. Gorman, Benjamin Shapiro  aNew York :bSpringer,cc2012  aviii, 384 p. :bill. ;c25 cm.  aIncludes bibliographical references and index 0aFeedback control systems 0aMicroelectromechanical systems 0aMicroelectronics1 aGorman, Jason J.1 aShapiro, Benjamin