TY  - BOOK
AU  - Gorman,Jason J.
AU  - Shapiro,Benjamin
TI  - Feedback control of MEMS to atoms
SN  - 9781441958310
PY  - 2012///
CY  - New York
PB  - Springer
KW  - Feedback control systems
KW  - Microelectromechanical systems
KW  - Microelectronics
N1  - Includes bibliographical references and index
ER  -