Leach, Richard <br/><br/>
Fundamental principles of engineering nanometrology / 
by Richard K. Leach 
 - Oxford, UK :  Elsevier Science,  2010 
 - xxvi, 321 p. :  ill. ;  24 cm. 
 - Micro and nano technologies .
 - Micro and nano technologies .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780080964546 0080964540 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology<br/>Microtechnology<br/>Metrology