TY  - BOOK
AU  - Leach,Richard
TI  - Fundamental principles of engineering nanometrology
T2  - Micro and nano technologies
SN  - 9780080964546
PY  - 2010///
CY  - Oxford, UK
PB  - Elsevier Science
KW  - Nanotechnology
KW  - Microtechnology
KW  - Metrology
N1  - Includes bibliographical references and index
ER  -