Wüthrich, Rolf <br/><br/>
Micromachining using electrochemical discharge phenomenon :  fundamentals and applications of spark assisted chemical engraving / 
Rolf Wüthrich 
 - Oxford, UK :  William Andrew,  c2009 
 - xiv, 181 p. :  ill. ;  27 cm. 
 - Micro & nano technologies ;  6 .
 - Micro & nano technologies ;  6 .
<br/><br/>Includes bibliographical references (p. 167-172) and index 
<br/><br/><label>ISBN: </label>9780815515876 0815515871 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Micromachining<br/>Electrochemical cutting<br/>Electric discharges--Industrial applications<br/>Plasma etching