TY - BOOK AU - Wüthrich,Rolf TI - Micromachining using electrochemical discharge phenomenon: fundamentals and applications of spark assisted chemical engraving T2 - Micro & nano technologies SN - 9780815515876 PY - 2009/// CY - Oxford, UK PB - William Andrew KW - Micromachining KW - Electrochemical cutting KW - Electric discharges KW - Industrial applications KW - Plasma etching N1 - Includes bibliographical references (p. 167-172) and index ER -