Lyshevski, Sergey Edward <br/><br/>
Nano-and micro-electromechanical systems :  fundamentals of nano- and microengineering / 
Sergey Edward Lyshevski 
 - 2nd ed. 
 - Boca Raton, Florida :  CRC Press,  2005 
 - 722 p. :  ill. ;  26 cm 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/><label>ISBN: </label>0849328381 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Nanotechnology