TY  - BOOK
AU  - Dobkin,Daniel Mark
AU  - Zuraw,Michael K.
TI  - Principles of chemical vapor deposition: what's going on inside the reactor 
SN  - 1402012489
PY  - 2003///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Vapor-plating
KW  - Refractory coating
N1  - Includes bibliographical references and index
ER  -