Into the nano era / 
Howard Huff, editor 
 - Berlin :  Springer,  c2009 
 - xxviii, 343 p. :  ill. ;  24 cm. 
 - Springer series in materials science ;  106 .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783540745587 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--History<br/>Silicon--Electric properties<br/>Semiconductors--Materials