TY  - BOOK
AU  - Huff,Howard R.
TI  - Into the nano era
T2  - Springer series in materials science
SN  - 9783540745587
PY  - 2009///
CY  - Berlin
PB  - Springer
KW  - Integrated circuits
KW  - History
KW  - Silicon
KW  - Electric properties
KW  - Semiconductors
KW  - Materials
N1  - Includes bibliographical references and index
ER  -